Mechanical Resonators for Quantum Optomechanics Experiments at Room Temperature

All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here, we present a novel design of on-chip mechanical resonators which exhibit fundamental modes with frequencies f and mechanical quality factors Q_{m}...

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Bibliographic Details
Published in:Physical review letters 2016-04, Vol.116 (14), p.147202-147202, Article 147202
Main Authors: Norte, R A, Moura, J P, Gröblacher, S
Format: Article
Language:English
Subjects:
Membranes
Opto-mechanics
Photonic crystals
Quality factor
Reflectivity
Resonators
Tensile stress
Yield strength
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Summary:All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here, we present a novel design of on-chip mechanical resonators which exhibit fundamental modes with frequencies f and mechanical quality factors Q_{m} sufficient to enter the optomechanical quantum regime at room temperature. We overcome previous limitations by designing ultrathin, high-stress silicon nitride (Si_{3}N_{4}) membranes, with tensile stress in the resonators' clamps close to the ultimate yield strength of the material. By patterning a photonic crystal on the SiN membranes, we observe reflectivities greater than 99%. These on-chip resonators have remarkably low mechanical dissipation, with Q_{m}∼10^{8}, while at the same time exhibiting large reflectivities. This makes them a unique platform for experiments towards the observation of massive quantum behavior at room temperature.
ISSN:0031-9007
1079-7114
DOI:10.1103/PhysRevLett.116.147202