Optical properties of TixAl1−xN thin films in the whole compositional range

We present a study on a wide variety of TixAl1−xN magnetron sputtered thin films, covering the whole compositional range (0≤x≤1) and exhibiting both the hexagonal and cubic phases, using spectroscopic ellipsometry (SE) and the optical modeling based on Drude's model and two Lorentz oscillators...

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Bibliographic Details
Published in:Surface & coatings technology 2016-06, Vol.295, p.125-129
Main Authors: Kassavetis, S., Abadias, G., Vourlias, G., Bantsis, G., Logothetidis, S., Patsalas, P.
Format: Article
Language:English
Subjects:
Aluminum
Crystal structure
Electrically conductive
Electronics
Optical absorption
Optical properties
Oscillators
Phases
Resistivity
Semiconductors
Thin films
TixAl1 − xN
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Summary:We present a study on a wide variety of TixAl1−xN magnetron sputtered thin films, covering the whole compositional range (0≤x≤1) and exhibiting both the hexagonal and cubic phases, using spectroscopic ellipsometry (SE) and the optical modeling based on Drude's model and two Lorentz oscillators in order to study the intraband and interband absorption. The cubic B1‐TixAl1−xN phase is formed for x>0.3 and it is electrically conductive with conduction electron density and resistivity/conductivity varying with the Al content, while the hexagonal phase w‐TixAl1−xN (x
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2015.08.049