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Polarization-Stable 980 nm Vertical-Cavity Surface-Emitting Lasers with Diamond-Shaped Oxide Aperture
Polarization-stable 980 nm oxide-confined vertical-cavity surface-emitting lasers with 3[mu]m diamond-shaped aperture are fabricated by comprehensively utilizing the anisotropic properties of wet etching and wet nitrogen oxidation of III-V semiconductor materials. Polarization-stable operation along...
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Published in: | Chinese physics letters 2015-04, Vol.32 (4), p.044202-1-044202-4 |
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Main Authors: | , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | Polarization-stable 980 nm oxide-confined vertical-cavity surface-emitting lasers with 3[mu]m diamond-shaped aperture are fabricated by comprehensively utilizing the anisotropic properties of wet etching and wet nitrogen oxidation of III-V semiconductor materials. Polarization-stable operation along the major axis of the diamond-shaped oxide aperture with 11 dB orthogonal polarization suppression ratio is achieved in a temperature range of 15-55[degrees]C from the threshold to 4mA. |
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ISSN: | 0256-307X 1741-3540 |
DOI: | 10.1088/0256-307X/32/4/044202 |