Fundamentals of electron energy-loss spectroscopy

Electron energy-loss spectroscopy (EELS) is an analytical technique that is based on inelastic scattering of fast electrons in a thin specimen. In a transmission electron microscope (TEM) it can provide structural and chemical information about a specimen, even down to atomic resolution. This review...

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Bibliographic Details
Published in:IOP conference series. Materials Science and Engineering 2016-02, Vol.109 (1), p.12007-12015
Main Authors: Hofer, F, Schmidt, F P, Grogger, W, Kothleitner, G
Format: Article
Language:English
Subjects:
Atomic structure
Eels
Electron energy
Electron energy loss spectroscopy
Electrons
Inelastic scattering
Mathematical analysis
Plasmonics
Quantitative analysis
Scanning transmission electron microscopy
Spectroscopy
Spectrum analysis
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Summary:Electron energy-loss spectroscopy (EELS) is an analytical technique that is based on inelastic scattering of fast electrons in a thin specimen. In a transmission electron microscope (TEM) it can provide structural and chemical information about a specimen, even down to atomic resolution. This review provides an overview of the physical basis and new developments and applications of EELS in scanning transmission electron microscopy. Recent advances in elemental mapping, spectrum imaging of plasmonic structures and quantitative analysis of atomically resolved elemental maps are highlighted.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/109/1/012007