Performance improvement of TiO sub(2)/Ag/TiO sub(2) multilayer transparent conducting electrode films for application on photodetectors

TiO sub(2)/Ag/TiO sub(2) (TAT) multilayer transparent conducting electrodes were deposited onto glass substrates by room temperature sputtering. The impact of Ag sputtering current on the film morphology, and the optical and electrical properties were discussed. The increase in the sputtering curren...

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2016-03, Vol.49 (11), p.115108-115114
Main Authors: Zhu, Meng-Qi, Jin, Han-Dong, Bi, Peng-Qing, Zong, Fu-Jian, Jin, Jin, Hao, Xiao-Tao
Format: Article
Language:English
Subjects:
Conduction
Devices
Electrodes
Indium oxides
Multilayers
Photodetectors
Sputtering
Titanium dioxide
Online Access:Get full text
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Summary:TiO sub(2)/Ag/TiO sub(2) (TAT) multilayer transparent conducting electrodes were deposited onto glass substrates by room temperature sputtering. The impact of Ag sputtering current on the film morphology, and the optical and electrical properties were discussed. The increase in the sputtering current led to a more continuous Ag middle layer. As the Ag middle layer became continuous, the TAT electrodes had lower sheet resistance and higher transmittance. In addition, an optimized TAT electrode with a figure of merit of &$15.97\times {{10}-2}}{{\Omega }-1}}$ ; was obtained at an Ag thickness of 16 nm and a sputtering current of 0.48 A. Finally, organic photodetectors were also fabricated based on TAT electrodes and the performance is comparable to reference devices with commercially purchased Sn-doped In sub(2)O sub(3) (ITO) electrodes.
ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/49/11/115108