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A Study on (K, Na) NbO sub(3) Thin Films with Optimized Layer: Effect on Physical and Electrical Properties
(K, Na)NbO sub(3)(KNN) thin films were prepared by sol-gel technique. Spin coating deposition and rapid thermal annealing (RTP) process were applied to produce the KNN thin films. The films obtained demonstrated that highly crystallographic orientation was produced at five layer deposition with incr...
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Published in: | Key Engineering Materials 2016-05, Vol.694, p.120-124 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | (K, Na)NbO sub(3)(KNN) thin films were prepared by sol-gel technique. Spin coating deposition and rapid thermal annealing (RTP) process were applied to produce the KNN thin films. The films obtained demonstrated that highly crystallographic orientation was produced at five layer deposition with increase (preferred orientation) peak at (1 1 1). The thickness of five layers thin films observed by field emission scanning electron microscopy (FE-SEM) was determined to be ~200nm. However, the inhomogeneous distribution of KNN particles was detected in KNN thin films. The distribution of KNN elements was confirmed by energy-dispersive X-ray (EDX) spectra. Improvement was observed in resistivity (2.71-7.81x10 super(6)[Omega].cm) and dielectric loss (0.35%-0.21%) following the increasing number of layers. |
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ISSN: | 1013-9826 1662-9795 |
DOI: | 10.4028/www.scientific.net/KEM.694.120 |