Dual-Gate Photosensitive a-Si:H TFT Array Enabling Fingerprint-Sensor-Integrated Display Application

This paper reports on an integrative approach to a fingerprint sensor for an active matrix liquid crystal display (AMLCD). By redesigning the current driver hydrogenated amorphous silicon (a-Si:H) thin-film transistor (TFT) in the display pixel and making it a dual-gate photosensitive TFT with a π-s...

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Bibliographic Details
Published in:Journal of display technology 2016-08, Vol.12 (8), p.835-839
Main Authors: Xu, Man, Li, Huimin, Ou, Hai, Chen, Jun, Deng, Shaozhi, Xu, Ningsheng, Wang, Kai
Format: Article
Language:English
Subjects:
Amorphous silicon
Arrays
Channels
Display devices
dual-gate thin-film transistor
Electrodes
Fingerprint recognition
fingerprint sensor
Liquid crystal displays
Logic gates
Photosensitivity
Pixels
Semiconductor devices
Sensor arrays
Thin film transistors
Threshold voltage
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Summary:This paper reports on an integrative approach to a fingerprint sensor for an active matrix liquid crystal display (AMLCD). By redesigning the current driver hydrogenated amorphous silicon (a-Si:H) thin-film transistor (TFT) in the display pixel and making it a dual-gate photosensitive TFT with a π-shape channel, a fingerprint-sensor-integrated display pixel can be enabled with a potentially high sensitivity through properly biasing the TFT into the subthreshold region. We designed, fabricated and characterized the single-pixel TFT followed by the demonstration of a 4 × 4 sensor array along with capturing the first images.
ISSN:1551-319X
1558-9323
DOI:10.1109/JDT.2016.2540814