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High Mobility MoS2 Transistor with Low Schottky Barrier Contact by Using Atomic Thick h-BN as a Tunneling Layer

High‐performance MoS2 transistors are developed using atomic hexagonal boron nitride as a tunneling layer to reduce the Schottky barrier and achieve low contact resistance between metal and MoS2. Benefiting from the ultrathin tunneling layer within 0.6 nm, the Schottky barrier is significantly reduc...

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Published in:Advanced materials (Weinheim) 2016-10, Vol.28 (37), p.8302-8308
Main Authors: Wang, Jingli, Yao, Qian, Huang, Chun-Wei, Zou, Xuming, Liao, Lei, Chen, Shanshan, Fan, Zhiyong, Zhang, Kai, Wu, Wei, Xiao, Xiangheng, Jiang, Changzhong, Wu, Wen-Wei
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container_issue 37
container_start_page 8302
container_title Advanced materials (Weinheim)
container_volume 28
creator Wang, Jingli
Yao, Qian
Huang, Chun-Wei
Zou, Xuming
Liao, Lei
Chen, Shanshan
Fan, Zhiyong
Zhang, Kai
Wu, Wei
Xiao, Xiangheng
Jiang, Changzhong
Wu, Wen-Wei
description High‐performance MoS2 transistors are developed using atomic hexagonal boron nitride as a tunneling layer to reduce the Schottky barrier and achieve low contact resistance between metal and MoS2. Benefiting from the ultrathin tunneling layer within 0.6 nm, the Schottky barrier is significantly reduced from 158 to 31 meV with small tunneling resistance.
doi_str_mv 10.1002/adma.201602757
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subjects contact resistance
hexagonal boron nitride
MoS2
tunneling
title High Mobility MoS2 Transistor with Low Schottky Barrier Contact by Using Atomic Thick h-BN as a Tunneling Layer
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