Rapid serial prototyping of magnet-tipped attonewton-sensitivity cantilevers by focused ion beam manipulation

• Published in: Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Microelectronics and nanometer structures processing, measurement and phenomena, 2011-05, Vol.29 (3), p.032001-032001-8
• Main Authors: Longenecker, Jonilyn G., Moore, Eric W., Marohn, John A.
• Format: Article
• Language: English
• ISSN: 1071-1023; 2166-2746; 1520-8567; 2166-2754
• DOI: 10.1116/1.3581102

The authors report a method for rapidly prototyping attonewton-sensitivity cantilevers with custom-fabricated tips and illustrate the method by preparing tips consisting of a magnetic nanorod overhanging the leading edge of the cantilevers. Micron-long nickel nanorods with widths of 120-220 nm were fabricated on silicon chips by electron beam lithography, deposition, and lift-off. Each silicon chip, with its integral nanomagnet, was attached serially to a custom-fabricated attonewton-sensitivity cantilever using focused ion beam manipulation. The magnetic nanorod tips were prepared with and without an alumina capping layer, and the minimum detectable force and tip magnetic moment of the resulting cantilevers was characterized by cantilever magnetometry. The results indicate that this serial but high-yield approach is an effective way to rapidly prepare and characterize magnetic tips for the proposed single-electron-spin and single-proton magnetic resonance imaging experiments. The approach also represents a versatile route for affixing essentially any vacuum-compatible sample to the leading edge of an attonewton-sensitivity cantilever.