Tunable, low loss Ba sub(0.6)Sr sub(0.4)TiO sub(3)/Bi sub(1.5)Mg sub(1.0)Nb sub(1.5)O sub(7)/Ba sub(0 .6)Sr sub(0.4)TiO sub(3) multilayer thin films prepared by pulsed laser deposition

Ba sub(0.6)Sr sub(0.4)TiO sub( 3)/Bi sub(1.5)Mg sub(1.0)Nb sub(1.5)O sub(7)/Ba sub(0.6)Sr sub(0.4)TiO sub(3) (BST/BMN/BST) multilayer thin films and Ba sub(0.6)Sr sub(0.4)TiO sub(3) (BST) thin films were fabricated on Pt/Ti/SiO sub(2)/Si (1 0 0) substrates by pulsed laser deposition. The multilayer...

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Bibliographic Details
Published in:Journal of materials science. Materials in electronics 2016-08, Vol.27 (8), p.7947-7952
Main Authors: Ma, Baogang, Yu, Shihui, Chen, Shengtian, Zhang, Jieling, Huang, Xiushi, Liu, Qing, Zhang, Weifeng
Format: Article
Language:English
Subjects:
Dielectric constant
Dielectric loss
Microwaves
Multilayers
Pulsed laser deposition
Silicon substrates
Tangents
Thin films
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Summary:Ba sub(0.6)Sr sub(0.4)TiO sub( 3)/Bi sub(1.5)Mg sub(1.0)Nb sub(1.5)O sub(7)/Ba sub(0.6)Sr sub(0.4)TiO sub(3) (BST/BMN/BST) multilayer thin films and Ba sub(0.6)Sr sub(0.4)TiO sub(3) (BST) thin films were fabricated on Pt/Ti/SiO sub(2)/Si (1 0 0) substrates by pulsed laser deposition. The multilayer thin films show a dielectric constant of 314 and dielectric loss tangent of 0.006 at frequency of 0.1 MHz. The BST/BMN/BST multilayer thin films had a ~26.7 % relative tunability of dielectric constant at a maximum applied dc bias field of 357 kV/cm, while the figure of merit is 45.5. No obvious hysteresis behavior was observed in the BST/BMN/BST multilayer thin films. The excellent dielectric constant and tunability, low dielectric loss tangent suggest that BST/BMN/BST multilayer thin films have giant potential application for tunable microwave device.
ISSN:0957-4522
1573-482X
DOI:10.1007/s10854-016-4787-8