Online optimized parameters for RLS-LT controller - application to processes with mixed products and feature aging

This paper presents an iterative approach, which provides optimal solutions of the best achievement performance in the case of closed-loop aged-based processes applied on semiconductor manufacturing industry. The aim is to provide an online parameter estimation of RLS-LT controller in the case of mi...

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Bibliographic Details
Main Authors: Graton, Guillaume, El Adel, El Mostafa, Ouladsine, Mustapha, Pinaton, Jacques
Format: Conference Proceeding
Language:English
Subjects:
Aging
Conferences
Controllers
Electronics
Manufacturing
Mathematical model
Mechanical polishing
Noise measurement
Online
Optimization
Process control
Semiconductor device modeling
Semiconductors
Simulation
Transfer functions
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Summary:This paper presents an iterative approach, which provides optimal solutions of the best achievement performance in the case of closed-loop aged-based processes applied on semiconductor manufacturing industry. The aim is to provide an online parameter estimation of RLS-LT controller in the case of mixed product Run-to-Run (RtR) control. The online estimation is done without any a priori knowledge of process parameters and noise structure. The best achievement performance improvement is illustrated using a simulation problem from literature and the example is applied on the removal rate control in a Chemical Mechanical Polishing (CMP) process.
ISSN:2379-0067
DOI:10.1109/ICoSC.2016.7507071