Fabrication and characterization of high-contrast mid-infrared GeTe sub(4) channel waveguides

We report the fabrication and characterization of high index contrast ([Delta]n[approximate]0.9) GeTe sub(4) channel waveguides on ZnSe substrate for evanescent-field-based biosensing applications in the mid-IR spectral region. GeTe sub(4) films were deposited by RF sputtering and characterized for...

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Bibliographic Details
Published in:Optics letters 2015-05, Vol.40 (9), p.2016-2019
Main Authors: Mittal, Vinita, Aghajani, Armen, Carpenter, Lewis G, Gates, James C, Butement, Jonathan, Smith, Peter G R, Wilkinson, James S, Murugan, Ganapathy Senthil
Format: Article
Language:English
Subjects:
Channels
Spectra
Sputtering
Substrates
Wave propagation
Waveguides
Wavelengths
Zinc selenides
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Summary:We report the fabrication and characterization of high index contrast ([Delta]n[approximate]0.9) GeTe sub(4) channel waveguides on ZnSe substrate for evanescent-field-based biosensing applications in the mid-IR spectral region. GeTe sub(4) films were deposited by RF sputtering and characterized for their structure, composition, transparency, and dispersion. The lift-off technique was used to pattern the waveguide channels. Waveguiding from 2.5-3.7 and 6.4-7.5 [mu]m was demonstrated, and mode intensity profile and estimated propagation losses are given for the 3.5 [mu]m wavelength.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.40.002016