Facile Fabrication of Silicon Nanotube Arrays and Their Application in Lithium-Ion Batteries

In this study, the authors report for the first time a wafer‐scale method for fabricating vertical‐aligned silicon nanotubes (SiNTs) on a silicon substrate using a combination of nanoimprint lithography (NIL) and metal‐assisted chemical etching (MaCE) processes. The structural properties and adhesio...

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Bibliographic Details
Published in:Advanced engineering materials 2016-08, Vol.18 (8), p.1349-1353
Main Authors: Kim, Young-You, Kim, Han-Jung, Jeong, Jun-Ho, Lee, Jihye, Choi, Jun-Hyuk, Jung, Joo-Yun, Lee, Jeong-Hwa, Cheng, Horchhong, Lee, Ki-Won, Choi, Dae-Geun
Format: Article
Language:English
Subjects:
Anodes
Lithium-ion batteries
Lithography
Nanostructure
Nanotechnology
Scanning electron microscopy
Silicon
Silicon substrates
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Summary:In this study, the authors report for the first time a wafer‐scale method for fabricating vertical‐aligned silicon nanotubes (SiNTs) on a silicon substrate using a combination of nanoimprint lithography (NIL) and metal‐assisted chemical etching (MaCE) processes. The structural properties and adhesion strength characteristics of the prepared SiNTs are investigated via field emission scanning electron microscope (FE‐SEM), transmission electron microscope (TEM) analysis, and adhesion test. And, the authors successfully demonstrate the feasibility of using the fabricated SiNTs in a Li‐ion battery (LIB) anode, and their potential to enhance LIB technologies. In this work, the authors report a simple and cost‐effective approach to fabricate silicon nanotubes using a combination of nanoimprint lithography and etching processes. The silicon nanotube anode obtained from this method shows a significantly improved electrochemical cycling performance compared to the SiNWs‐based anode.
ISSN:1438-1656
1527-2648
DOI:10.1002/adem.201600213