TLP evaluation of ESD protection capability of graphene micro-ribbons for ICs

Transmission line pulse (TLP) measurements were carried out to study electrostatic discharge (ESD) protection capability of monolayer and bilayer graphene micro-ribbons (GR) as IC interconnects. For 100 ns pulse duration (t d ) and 10 ns pulse rise time (t r ), the second breakdown TLP test current...

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Bibliographic Details
Main Authors: Wei Zhang, Qi Chen, Ming Xia, Rui Ma, Fei Lu, Chenkun Wang, Wang, Albert, Ya-Hong Xie
Format: Conference Proceeding
Language:English
Subjects:
Circuit design
Circuit protection
Current density
Electronics
Electrostatic discharges
Graphene
Immune system
Integrated circuit interconnections
Interconnections
Metals
Monolayers
Transmission line measurements
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Summary:Transmission line pulse (TLP) measurements were carried out to study electrostatic discharge (ESD) protection capability of monolayer and bilayer graphene micro-ribbons (GR) as IC interconnects. For 100 ns pulse duration (t d ) and 10 ns pulse rise time (t r ), the second breakdown TLP test current density limit reaches around 3.34 × 10 8 A/cm 2 for monolayer GRs and 2.27 × 10 8 A/cm 2 for bilayer GRs, which are both superior to that of Cu wires, commonly used as interconnects for CMOS ICs. This study of large number of sample splits provide design guidelines for on-chip ESD protection circuits using graphene interconnects for future ICs.
ISSN:2162-755X
DOI:10.1109/ASICON.2015.7516901