Experiments on plasma immersion ion implantation inside conducting tubes embedded in an external magnetic field

• Published in: Applied surface science 2015-12, Vol.357, p.1438-1443
• Main Authors: Pillaca, E.J.D.M., Ueda, M., Reuther, H., Pichon, L., Lepienski, C.M.
• Format: Article
• Language: English
• Subjects: Current density; Electrodes; Immersion; Ion implantation; Magnetic fields; PIII inside conducting tubes; PIII with magnetic field; Plasma immersion ion implantation; Supplying; Tubes; Walls
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2015.09.210

•Gas breakdown inside tube was preferably established above pressures of 2.0×10−2mbar.•Presence of AE inside the tube with medium diameter tube was essential to obtain a thick nitrogen layer of about 9μm.•Surface hardness of stainless steel was improved by about five times. Tubes of stainless steel (SS) embedded in external magnetic field were used to study the effects of plasma immersion ion implantation (PIII) as a function of their diameter. The study was complemented with and without a grounded auxiliary electrode (AE) placed at the axis of the tube. During the discharge tests in tubes of larger diameter (D=11cm), with and without AE, nitrogen gas breakdown was established inside the tube at pressures near 2.0×10−2mbar. Under the same operation conditions, stable plasmas with similar PIII current densities were obtained for both arrangements. Reducing the diameter of the tube (D=1.5cm) turned the plasma unstable and made it inappropriate for ion implantation. This situation was solved by supplying gas at higher pressure or using higher magnetic field, without the presence of an AE. Under these conditions, nitrogen PIII treatments of these small diameter tubes were performed but gave not the best implantation results yet. Our results have also shown higher ion implantation current density (16mA/cm2) in tube of intermediate diameter (D=4cm) using AE, compared to largest diameter tube used. In this case, a thick nitrogen layer of about 9μm was obtained in the SS sample placed inside the tube. As a consequence of this, its structural and mechanical properties were enhanced. These results are attributed to the thermal diffusion promoted by ions hitting the inner wall in a large number due to the presence of the AE and the magnetic field.