Synthesis of High-Quality Large-Area Homogenous 1T′ MoTe2 from Chemical Vapor Deposition

High‐quality large‐area few‐layer 1T′ MoTe2 films with high homogeneity are synthesized by the controlled tellurization of MoO3 film. The Mo precursor plays a key role in determining the quality and morphology of the 1T′ MoTe2. Furthermore, the amount of Te strongly influences the phase of the MoTe2...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2016-11, Vol.28 (43), p.9526-9531
Main Authors: Zhou, Lin, Zubair, Ahmad, Wang, Ziqiang, Zhang, Xu, Ouyang, Fangping, Xu, Kai, Fang, Wenjing, Ueno, Keiji, Li, Ju, Palacios, Tomás, Kong, Jing, Dresselhaus, Mildred S.
Format: Article
Language:English
Subjects:
2D materials
chemical vapor deposition
molybdenum ditelluride
transition-metal dichalcogenides
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Summary:High‐quality large‐area few‐layer 1T′ MoTe2 films with high homogeneity are synthesized by the controlled tellurization of MoO3 film. The Mo precursor plays a key role in determining the quality and morphology of the 1T′ MoTe2. Furthermore, the amount of Te strongly influences the phase of the MoTe2. The growth method paves the way toward the scalable production of 1T′ MoTe2‐based applications.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.201602687