Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition

We report the design of a mobile setup for synchrotron based in situ studies during atomic layer processing. The system was designed to facilitate in situ grazing incidence small angle x-ray scattering (GISAXS), x-ray fluorescence (XRF), and x-ray absorption spectroscopy measurements at synchrotron...

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Bibliographic Details
Published in:Review of scientific instruments 2016-11, Vol.87 (11), p.113905-113905
Main Authors: Dendooven, Jolien, Solano, Eduardo, Minjauw, Matthias M., Van de Kerckhove, Kevin, Coati, Alessandro, Fonda, Emiliano, Portale, Giuseppe, Garreau, Yves, Detavernier, Christophe
Format: Article
Language:English
Subjects:
Atomic layer epitaxy
High vacuum
Nuclear reactors
Radio frequency plasma
Ruthenium
Scientific apparatus & instruments
Small angle X ray scattering
Synchrotron radiation
Synchrotrons
Thermodynamic properties
Toruses
Vacuum pumps
X ray absorption
X-ray fluorescence
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Summary:We report the design of a mobile setup for synchrotron based in situ studies during atomic layer processing. The system was designed to facilitate in situ grazing incidence small angle x-ray scattering (GISAXS), x-ray fluorescence (XRF), and x-ray absorption spectroscopy measurements at synchrotron facilities. The setup consists of a compact high vacuum pump-type reactor for atomic layer deposition (ALD). The presence of a remote radio frequency plasma source enables in situ experiments during both thermal as well as plasma-enhanced ALD. The system has been successfully installed at different beam line end stations at the European Synchrotron Radiation Facility and SOLEIL synchrotrons. Examples are discussed of in situ GISAXS and XRF measurements during thermal and plasma-enhanced ALD growth of ruthenium from RuO4 (ToRuS™, Air Liquide) and H2 or H2 plasma, providing insights in the nucleation behavior of these processes.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4967711