A mechanical–thermal noise analysis of a nonlinear microgyroscope

The mechanical–thermal noise (MTN) equivalent rotation rate (Ωn) is computed by using the linear approximation of the system response and the nonlinear “slow” system. The slow system, which is obtained using the method of multiple scales, is used to identify the linear single-valued response of the...

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Bibliographic Details
Published in:Mechanical systems and signal processing 2017-01, Vol.83, p.163-175
Main Authors: Lajimi, S.A.M., Heppler, G.R., Abdel-Rahman, E.M.
Format: Article
Language:English
Subjects:
Approximation
Design engineering
Equivalence
Estimates
Mathematical analysis
Mechanical systems
MEMS gyroscope
Method of multiple scales
Noise
Noise-equivalent rotation rate
Nonlinearity
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Summary:The mechanical–thermal noise (MTN) equivalent rotation rate (Ωn) is computed by using the linear approximation of the system response and the nonlinear “slow” system. The slow system, which is obtained using the method of multiple scales, is used to identify the linear single-valued response of the system. The linear estimate of the noise equivalent rate fails as the drive direction stroke increases. It becomes imperative in these conditions to use a more complex nonlinear estimate of the noise equivalent rate developed here for the first time in literature. The proposed design achieves a high performance regarding noise equivalent rotation rate.
ISSN:0888-3270
1096-1216
DOI:10.1016/j.ymssp.2016.06.005