Interferometric measurement of surface shape by wavelength tuning suppressing random intensity error

In this research, the susceptibility of the phase-shifting algorithms to the random intensity error is formulated and estimated. The susceptibility of the random intensity error of conventional windowed phase-shifting algorithms is discussed, and the 7N-6 phase-shifting algorithm is developed to min...

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Bibliographic Details
Published in:Applied optics (2004) 2016-08, Vol.55 (23), p.6464-6470
Main Authors: Kim, Yangjin, Hibino, Kenichi, Sugita, Naohiko, Mitsuishi, Mamoru
Format: Article
Language:English
Subjects:
Algorithms
Errors
Interferometers
Polynomials
Retarding
Tuning
Wavelengths
Wedges
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Summary:In this research, the susceptibility of the phase-shifting algorithms to the random intensity error is formulated and estimated. The susceptibility of the random intensity error of conventional windowed phase-shifting algorithms is discussed, and the 7N-6 phase-shifting algorithm is developed to minimize the random intensity error using the characteristic polynomial theory. Finally, the surface shape of the transparent wedge plate is measured using a wavelength-tuning Fizeau interferometer and the 7N-6 algorithm. The experimental results indicate that the surface shape measurement accuracy for the transparent plate is 2.5 nm.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.55.006464