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Model for stress and volume changes of a thin film on a substrate upon annealing: Application to amorphous Mo/Si multilayers

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Bibliographic Details
Published in:	Physical review. B, Condensed matter Condensed matter, 1991-12, Vol.44 (24), p.13519-13533
Main Authors:	Loopstra, OB, van Snek ER, de Keijser TH, Mittemeijer, EJ
Format:	Article
Language:	English
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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