Amorphization processes in electron- and/or ion-irradiated silicon

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Bibliographic Details
Published in:Physical review letters 1987-03, Vol.58 (9), p.900-903
Main Authors: SEIDMAN, D. N, AVERBACK, R. S, OKAMOTO, P. R, BAILY, A. C
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Equations of state, phase equilibria, and phase transitions
Exact sciences and technology
Physics
Specific phase transitions
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ISSN:0031-9007
1079-7114
DOI:10.1103/physrevlett.58.900