Development of a high energy resolution electron energy‐loss spectroscopy microscope

We have developed a high energy resolution electron energy‐loss spectroscopy (EELS) microscope, which can take spectra from specified small specimen areas and specified small reciprocal space areas to investigate detailed electronic structures. The EELS microscope is equipped with retarding Wien fil...

Full description

Saved in:
Bibliographic Details
Published in:Journal of microscopy (Oxford) 1999-04, Vol.194 (1), p.203-209
Main Authors: Terauchi, M, Tanaka, M, Tsuno, K, Ishida, M
Format: Article
Language:English
Subjects:
Band gap energy
core exciton of diamond
density of states of a‐rhombohedral boron
electron energy‐loss spectroscopy microscope
high energy‐resolution
retardation
stigmatic focus
Wien filter
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We have developed a high energy resolution electron energy‐loss spectroscopy (EELS) microscope, which can take spectra from specified small specimen areas and specified small reciprocal space areas to investigate detailed electronic structures. The EELS microscope is equipped with retarding Wien filters as the monochromator and the analyser. The filters are designed to achieve a stigmatic focus. The energy resolutions are 12 meV and 25 meV for cases without and with a specimen, respectively. Spatial and momentum resolutions are 30–110 nm in diameter and 1.1 nm−1 in angular diameter, respectively. EELS spectra are presented to show the performance of this instrument.
ISSN:0022-2720
1365-2818
DOI:10.1046/j.1365-2818.1999.00450.x