Practical SEM system based on the montage technique applicable to ultralow-magnification observation, while maintaining original functions

A newly developed SEM system has been utilized for obtaining ultralow-magnification SEM images. It is a successful combination of the modern SEM equipped with a motor drive stage fully controlled with PC and digital image processing techniques for automatic montage. In order to accomplish a practica...

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Bibliographic Details
Published in:Journal of electron microscopy 2000, Vol.49 (1), p.135-141
Main Authors: Oho, Eisaku, Okugawa, Kenichi, Kawamata, Shigeru
Format: Article
Language:English
Subjects:
active image processing
digital image processing
montage
PC-SEM
scanning electron microscope
ultralow-magnification
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Description
Summary:A newly developed SEM system has been utilized for obtaining ultralow-magnification SEM images. It is a successful combination of the modern SEM equipped with a motor drive stage fully controlled with PC and digital image processing techniques for automatic montage. In order to accomplish a practical system, several problems peculiar to the field of SEM, i.e. raster rotation, peripheral distortion and charging effects, are discussed and solved. The function of ultralow-magnification (whole area) observation is important during a scanning electron microscopy session.
ISSN:0022-0744
1477-9986
DOI:10.1093/oxfordjournals.jmicro.a023777