A dual-axis single-proof-mass angular accelerometer for a vestibular prosthesis

A dual-axis single-proof-mass angular accelerometer has been developed for a vestibular prosthesis. Designed to sense head rotations both in the yaw and the pitch planes, the output of the inertial sensor may be coded as amplitude or rate modulated biphasic current pulses to stimulate vestibular ner...

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Bibliographic Details
Main Authors: Yaesuk Jeong, Toreyin, Hakan, Daruwalla, Anosh, Bhatti, Pamela, Ayazi, Farrokh
Format: Conference Proceeding
Language:English
Subjects:
Acceleration
Accelerometers
Electrodes
Irrigation
Prosthetics
Sensitivity
Sensors
Online Access:Get full text
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Summary:A dual-axis single-proof-mass angular accelerometer has been developed for a vestibular prosthesis. Designed to sense head rotations both in the yaw and the pitch planes, the output of the inertial sensor may be coded as amplitude or rate modulated biphasic current pulses to stimulate vestibular nerves. Fabricated with a high aspect ratio commercial process, a sensor with small form factor (1.4 mm × 0.8 mm) is achieved with a scale factor of 95.5 μV/rad/sec 2 and 145.8 μV/rad/sec 2 in the yaw and the pitch planes, respectively. Superior linear acceleration rejection was demonstrated for both rotating axis, and an overall power consumption of 296 μW was estimated including sensor and interface circuit.
ISSN:1557-170X
2694-0604
DOI:10.1109/EMBC.2016.7591775