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Properties of sputter deposited Ni-base superalloys for microelectromechanical systems

Nickel-base superalloy 718 films have been sputter deposited to thicknesses of 20μm. These as-deposited films were single-phase nanocrystalline solid solutions, which possessed tensile strengths of 1GPa but negligible ductility. Standard 718 aging heat treatments resulted in modest grain growth, aty...

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Bibliographic Details
Published in:Thin solid films 2014-05, Vol.558, p.20-23
Main Authors: Burns, Devin E., Zhang, Yong, Weihs, Timothy P., Hemker, Kevin J.
Format: Article
Language:English
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Summary:Nickel-base superalloy 718 films have been sputter deposited to thicknesses of 20μm. These as-deposited films were single-phase nanocrystalline solid solutions, which possessed tensile strengths of 1GPa but negligible ductility. Standard 718 aging heat treatments resulted in modest grain growth, atypical precipitation behavior, significant ductility, and impressive strengths at both ambient (2GPa at 25°C) and elevated (750MPa at 700°C) temperatures. The density of grain boundaries was shown to have a dramatic effect on the precipitation pathways of this alloy. •Exceptional room temperature strength (2GPa) and ductility after aging•Sputtered superalloy had a similar composition as the target.•Film was essentially quenched from the vapor forming a solid solution.•Heat treatment resulted in unique precipitation pathways.•Small grain size contributed to mechanical properties and precipitation.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2014.02.051