Surface modification of titanium using He plasma

Helium plasma irradiation to metals could be a potential novel surface modification method in nanoscale. In this study, systematic helium plasma irradiations to titanium were conducted in low ion energy (1025 m-2) regime. From the surface analysis by scanning electron microscopy and transmission ele...

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Bibliographic Details
Published in:Applied surface science 2014-06, Vol.303, p.438-445
Main Authors: KAJITA, Shin, KITAOKA, Daiki, OHNO, Noriyasu, YOSHIHARA, Reiko, YOSHIDA, Naoaki, YOSHIDA, Tomoko
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Helium
Helium plasma
Irradiation
Morphology
Nanostructure
Physics
Sputtering
Titanium
Transmission electron microscopy
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Summary:Helium plasma irradiation to metals could be a potential novel surface modification method in nanoscale. In this study, systematic helium plasma irradiations to titanium were conducted in low ion energy (1025 m-2) regime. From the surface analysis by scanning electron microscopy and transmission electron microscopy, various types of morphology changes, i.e. nanocone, pinhole, porous structure, and rough surfaces, were identified. The experimental conditions that control the various morphology changes are revealed from the aspect of the incident ion energy and the surface temperature. Based on the observations, it is thought that helium bubble growth, surface diffusion, and physical sputtering played important roles for the morphology change.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2014.03.022