Synthesis of High-Quality Large-Area Homogenous 1T' MoTe sub(2) from Chemical Vapor Deposition

High-quality large-area few-layer 1T' MoTe sub(2) films with high homogeneity are synthesized by the controlled tellurization of MoO sub(3) film. The Mo precursor plays a key role in determining the quality and morphology of the 1T' MoTe sub(2). Furthermore, the amount of Te strongly influ...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2016-11, Vol.28 (43), p.9526-9531
Main Authors: Zhou, Lin, Zubair, Ahmad, Wang, Ziqiang, Zhang, Xu, Ouyang, Fangping, Xu, Kai, Fang, Wenjing, Ueno, Keiji, Li, Ju, Palacios, Tomas, Kong, Jing, Dresselhaus, Mildred S
Format: Article
Language:English
Subjects:
Chemical vapor deposition
Homogeneity
Morphology
Precursors
Synthesis
Synthesis (chemistry)
Online Access:Get full text
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Summary:High-quality large-area few-layer 1T' MoTe sub(2) films with high homogeneity are synthesized by the controlled tellurization of MoO sub(3) film. The Mo precursor plays a key role in determining the quality and morphology of the 1T' MoTe sub(2). Furthermore, the amount of Te strongly influences the phase of the MoTe sub(2). The growth method paves the way toward the scalable production of 1T' MoTe sub(2)-based applications.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.201602687