Toward Scalable Flexible Nanomanufacturing for Photonic Structures and Devices

Continuous and scalable nanopatterning over flexible substrates is highly desirable for both commercial and scientific interests, but is difficult to realize with traditional photolithographic processes. The recent advancements in nanofabrication methodologies enable light management with photonic s...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2016-12, Vol.28 (47), p.10353-10380
Main Authors: Qiao, Wen, Huang, Wenbin, Liu, Yanhua, Li, Xiangmin, Chen, Lin-Sen, Tang, Jian-Xin
Format: Article
Language:English
Subjects:
Devices
Electronics
flexible nanomanufacturing
light management
Management
Nanostructure
Optoelectronic devices
organic optoelectronics
Patterning
photonic structures
Photonics
Substrates
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Summary:Continuous and scalable nanopatterning over flexible substrates is highly desirable for both commercial and scientific interests, but is difficult to realize with traditional photolithographic processes. The recent advancements in nanofabrication methodologies enable light management with photonic structures on flexible materials, providing an increasingly popular strategy to control the light harvesting in the optoelectronic devices of photovoltaics, and in organic and inorganic light‐emitting diodes. Here, the current status of nanopatterning technologies for the fabrication of optoelectronic devices is summarized. Scalable nanopatterning technologies for nanomanufacturing on flexible materials are emphasized. Critical challenges in various patterning techniques when considering the resolution, scalability, processing throughput, and the use of masks and resists are addressed. The integration of flexible nanopatterned substrates with light manipulation in organic optoelectronic devices is also discussed; this enables the control of light flux and spectra. Finally, potential development directions are highlighted. Recent advances in continuous and scalable nanopatterning technologies for the fabrication of flexible electronic and photonic devices are reviewed. Critical challenges in various nanofabrication methodologies and light management with photonic structures on flexible organic optoelectronic devices are addressed in terms of material compatibility, processing throughput, and device performance.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.201601801