Time-resolved imaging and optical spectroscopy of plasma plumes during pulsed laser material deposition

We employ fast imaging photography and emission spectroscopy to study plasma plumes resulting from the 248-nm ablation of barium strontium titanate, and we utilize x-ray diffraction analysis and scanning electron microscopy to characterize the deposited thin films. Hydrodynamic plume analyses yield...

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Bibliographic Details
Published in:Applied optics (2004) 2017-01, Vol.56 (3), p.B123-B133
Main Author: Sausa, Rosario C
Format: Article
Language:English
Subjects:
Ablation
Barium strontium titanates
Deposition
Fluid flow
Hydrodynamics
Imaging
Plumes
X ray diffraction
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Description
Summary:We employ fast imaging photography and emission spectroscopy to study plasma plumes resulting from the 248-nm ablation of barium strontium titanate, and we utilize x-ray diffraction analysis and scanning electron microscopy to characterize the deposited thin films. Hydrodynamic plume analyses yield initial velocities of approximately 20  km/s, whereas spectral simulations of the Ba I lines between 739 and 770 nm yield temperatures of approximately 17000 K at early times in vacuum. Analyses of the Stark broadened Ba II lines at 614 and 649 nm reveal an electron number density of approximately 10   cm near the surface. Several Pa of oxygen reduces these values while improving the film quality.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.56.00B123