Two-dimensional simulations of a VHF H sub(2) plasma for different discharge gaps and gas pressures

A two-dimensional simulation on a VHF H sub(2) plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H sub(3) super(+) and H super(+) densities as well a...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2016-07, Vol.55 (7), p.07LD01-07LD01
Main Authors: Chen, Kuan-Chen, Ogiwara, Kohei, Chiu, Kuo-Feng, Su, Li-Wen, Uchino, Kiichiro, Kawai, Yoshinobu
Format: Article
Language:English
Subjects:
Density
Discharge
Electron density
Gas pressure
Parameters
Plasma (physics)
Simulation
VHF
Online Access:Get full text
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Summary:A two-dimensional simulation on a VHF H sub(2) plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H sub(3) super(+) and H super(+) densities as well as the electron density had a maximum at a certain pressure, and the maximum shifted to high pressures as the discharge gap decreased. On the other hand, the H sub(2) super(+) density decreased with the increase in pressure, independent of the discharge gap. The axial profiles of the H super(+), H sub(2) super(+), and H sub(3) super(+) densities showed that dominant ions were H sub(3) super(+) in our pressure range.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.55.07LD01