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Structure diagnostics of heterostructures and multi‐layered systems by X‐ray multiple diffraction

This article presents the results of research on multi‐layered heterostructures by a modified calculation technique of multiple X‐ray diffraction. The AlxIn1−xSb heterostructure and a Zn(Mn)Se/GaAs(001) multi‐layered system were used as models to specify conditions for cases of coincidental coplanar...

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Bibliographic Details
Published in:Journal of applied crystallography 2017-06, Vol.50 (3), p.722-726
Main Authors: Borcha, Mariana, Fodchuk, Igor, Solodkyi, Mykola, Baidakova, Marina
Format: Article
Language:English
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Summary:This article presents the results of research on multi‐layered heterostructures by a modified calculation technique of multiple X‐ray diffraction. The AlxIn1−xSb heterostructure and a Zn(Mn)Se/GaAs(001) multi‐layered system were used as models to specify conditions for cases of coincidental coplanar three‐beam or coincidental noncoplanar four‐beam X‐ray diffraction. These conditions provide the means for a high‐precision determination of lattice parameters and strain anisotropy in layers. Opportunities of multi‐beam X‐ray diffraction are demonstrated for determination of lattice strains in heterostructures and multi‐layered systems.
ISSN:1600-5767
0021-8898
1600-5767
DOI:10.1107/S1600576717006574