Micro packaged MEMS pressure sensor for intracranial pressure measurement

• Published in: Journal of semiconductors 2015-06, Vol.36 (6), p.76-79
• Main Author: 刘雄 姚言 马嘉豪 张龑航 王谦 张兆华 任天令
• Format: Article
• Language: English
• Subjects: Chips; Intracranial pressure; MEMS; Microelectromechanical systems; Packages; Pressure sensors; Semiconductors; Sensors; Surgery; 传感器芯片; 内压测量; 压阻式压力传感器; 双列直插式封装; 微型封装; 最小尺寸; 液晶聚合物
• ISSN: 1674-4926
• DOI: 10.1088/1674-4926/36/6/064009

This paper presents a micro packaged MEMS pressure sensor for intracranial pressure measurement which belongs to BioMEMS. It can be used in lumbar puncture surgery to measure intracranial pressure. Minia- turization is key for lumbar puncture surgery because the sensor must be small enough to allow it be placed in the reagent chamber of the lumbar puncture needle. The size of the sensor is decided by the size of the sensor chip and package. Our sensor chip is based on silicon piezoresistive effect and the size is 400 × 400 μm2. It is much smaller than the reported polymer intracranial pressure sensors such as liquid crystal polymer sensors. In terms of package, the traditional dual in-line package obviously could not match the size need, the minimal size of recently reported MEMS-based intracranial pressure sensors after packaging is 10 × 10 mm2. In this work, we are the first to introduce a quad flat no-lead package as the package form of piezoresistive intracranial pressure sensors, the whole size of the sensor is minimized to only 3 × 3 mm2. Considering the liquid measurement environment, the sensor is gummed and waterproof performance is tested; the sensitivity of the sensor is 0.9 × 10-2 mV/kPa.