Polymer ERD standards and charge integration for low intensity He ion microbeams

Mylar and Kapton foils were used as elastic recoil detection (ERD) calibration standards for He ion microbeam currents of the order of 1pA. At these beam currents, electronic charge integration is inadequate. Therefore, the number of incident He ions Q was determined from RBS spectra taken concurren...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2007-08, Vol.261 (1-2), p.452-455
Main Authors: Lovelace, B., Bakhru, H., Haberl, A.W., Benenson, R.E.
Format: Article
Language:English
Subjects:
Hydrogen analysis
Microbeam ERD
Microscopy of hydrogen
Polymer ERD
Polymer ERD standards
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Summary:Mylar and Kapton foils were used as elastic recoil detection (ERD) calibration standards for He ion microbeam currents of the order of 1pA. At these beam currents, electronic charge integration is inadequate. Therefore, the number of incident He ions Q was determined from RBS spectra taken concurrently with the ERD. In one method, a Ta mask was overlaid on the polymer, and the beam was scanned across the boundary. Q was determined using the RBS peak from the Ta surface. Another method used the RBS spectrum from the polymer surface directly, where Q was determined from the nuclear resonances of He scattered from C at 5.67MeV and He scattered from O at 3.039MeV.
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2007.03.036