Broad-band surface optical coupler based on a SiO2-capped vertically curved silicon waveguide

A chip-surface optical coupler based on a vertically curved Si waveguide was demonstrated for coupling with high-numerical-aperture single-mode optical fibers with a mode-field diameter of 5 µm. This device features a dome-like SiO2 coupler cap, which acts as collimation lens. We succeeded in fabric...

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Bibliographic Details
Published in:Optics express 2018-04, Vol.26 (8), p.10400-10407
Main Authors: Atsumi, Yuki, Yoshida, Tomoya, Omoda, Emiko, Sakakibara, Youichi
Format: Article
Language:English
Online Access:Get full text
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Summary:A chip-surface optical coupler based on a vertically curved Si waveguide was demonstrated for coupling with high-numerical-aperture single-mode optical fibers with a mode-field diameter of 5 µm. This device features a dome-like SiO2 coupler cap, which acts as collimation lens. We succeeded in fabricating this structure using an isotropic SiO2 deposition technique employing plasma-enhanced chemical vapor deposition and obtained a light output that approximates that of a 5-µm-waist Gaussian beam. The fabricated coupler showed a coupling loss of less than 4.2 dB and a 0.5-dB-loss bandwidth above 150 nm for TE-polarized light.
ISSN:1094-4087
DOI:10.1364/OE.26.010400