Novel localized vibration-assisted magnetic abrasive polishing method using loose abrasives for V-groove and Fresnel optics finishing

This paper presents a new localized vibration-assisted magnetic abrasive polishing (VAMAP) method using loose abrasives for V-groove and Fresnel optics finishing. The purpose is to improve the surface quality while maintaining the form of the microfeatures. This method allows abrasives to access the...

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Bibliographic Details
Published in:Optics express 2018-04, Vol.26 (9), p.11608-11619
Main Authors: Guo, Jiang, Jong, Henry Jia Hua, Kang, Renke, Guo, Dongming
Format: Article
Language:English
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Summary:This paper presents a new localized vibration-assisted magnetic abrasive polishing (VAMAP) method using loose abrasives for V-groove and Fresnel optics finishing. The purpose is to improve the surface quality while maintaining the form of the microfeatures. This method allows abrasives to access the corners of the microfeatures and remove materials locally and uniformly by effectively controlling the magnetic field and vibration which overcomes the limitations of previous research. By using loose abrasives, the method achieved nanometer level surface roughness and damage-free surface while maintaining the form of the microfeatures. The results show that the surface roughness was reduced to about 7 nm Ra from the initial value of over 10 nm Ra while the microfeatures of V-groove and Fresnel optics were well maintained. At the same time, the surface defects including voids, scratches as well as tool marks were clearly removed.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.26.011608