A position-controllable external stage for critical dimension measurements via low-noise atomic force microscopy

•An independent automation stage has been developed for low-noise AFM.•The travel length of the external stage is 10 mm.•Initial position errors (

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Bibliographic Details
Published in:Ultramicroscopy 2018-11, Vol.194, p.48-56
Main Authors: Moon, Seunghyun, Kim, Jung-Hwan, Kim, Ju-Hwang, Kim, Youn Sang, Shin, ChaeHo
Format: Article
Language:English
Subjects:
Atomic force microscopy
Automation stage
Critical dimension
IVPS100
TGX1
Tip wearing
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Description
Summary:•An independent automation stage has been developed for low-noise AFM.•The travel length of the external stage is 10 mm.•Initial position errors (
ISSN:0304-3991
1879-2723
DOI:10.1016/j.ultramic.2018.07.005