Study on a micro-gas sensor with SnO sub(2)-NiO sensitive film for indoor formaldehyde detection

A micro-gas sensor is fabricated based on a micro-hotplate (MHP) with micromachining technology. The SnO sub(2)-NiO nanometer polycrystalline composite synthesized by a chemical co-precipitation method is coated onto a micro-hotplate as a sensitive film. The response and recovery time of the micro-g...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2008-05, Vol.132 (1), p.74-80
Main Authors: Lv, P, Tang, Z A, Yu, J, Zhang, F T, Wei, G F, Huang, Z X, Hu, Y
Format: Article
Language:English
Subjects:
Acetone
Actuators
Formaldehyde
Indoor
Micromachining
Power consumption
Sensors
Toluene
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Summary:A micro-gas sensor is fabricated based on a micro-hotplate (MHP) with micromachining technology. The SnO sub(2)-NiO nanometer polycrystalline composite synthesized by a chemical co-precipitation method is coated onto a micro-hotplate as a sensitive film. The response and recovery time of the micro-gas sensor decrease rapidly with increasing the formaldehyde (HCHO) concentration at relatively low concentrations. The micro-gas sensor shows good stability, low power consumption of 180mW at the MHP operation temperature of 300 super(o)C, and high selectivity in the presence of interference gases such as alcohol, toluene, a-pinene and acetone. The micro-gas sensor can detect 0.06ppm HCHO, which is the indoor exposure limit for HCHO referring to Chinese environmental protection agency (EPA).
ISSN:0925-4005
DOI:10.1016/j.snb.2008.01.018