Bragg reflectors for measuring optical parameters of layers of metamorphic InAlGaAs/GaAs heterostructures

Spectroscopic reflectometry was used within 700-1600 nm wavelength range to investigate dispersion curves for In Al As, In Al Ga As, and In Ga As layers, which constituted the purpose-made metamorphic InAlGaAs/GaAs Bragg reflector (BR). The procedure for determining the refractive index based on ana...

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Bibliographic Details
Published in:Optics express 2018-09, Vol.26 (18), p.A832-A843
Main Authors: Emelyanov, V M, Kalyuzhnyy, N A, Mintairov, S A, Shvarts, M Z
Format: Article
Language:English
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Summary:Spectroscopic reflectometry was used within 700-1600 nm wavelength range to investigate dispersion curves for In Al As, In Al Ga As, and In Ga As layers, which constituted the purpose-made metamorphic InAlGaAs/GaAs Bragg reflector (BR). The procedure for determining the refractive index based on analyzing variations in cross-correlation coefficient obtained for reflection coefficient calculated and experimental dependences is presented. The sensitivity of the proposed method for variations in refractive index was investigated depending on the number of BR periods, the extinction coefficient of the layers of BR, and the wavelength range with respect to the main reflection maximum.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.26.00A832