Oxide-thickness determination by proton-induced x-ray fluorescence

A discussion of the principles of oxygen surface density and, hence, oxide-thickness determination by proton-induced x-ray flurescence is followed by results of several applications of the technique. This technique has been shown to be useful for oxide thicknesses between ten and a few thousand Å. I...

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Bibliographic Details
Published in:Journal of applied physics 1972-01, Vol.43 (11), p.4786-4792
Main Authors: Musket, R. G., Bauer, W.
Format: Article
Language:English
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Summary:A discussion of the principles of oxygen surface density and, hence, oxide-thickness determination by proton-induced x-ray flurescence is followed by results of several applications of the technique. This technique has been shown to be useful for oxide thicknesses between ten and a few thousand Å. In practice, monoenergetic proton beams with energies between 100 and 400 keV produced characteristic x rays of all elements near the surface of aluminum, erbium dideuteride, copper, and stainless-steel specimens; these x rays were detected with a high-resolution Si(Li) detector. The oxygen Kα x-ray yields (x rays/proton) for these specimens were calibrated using known oxygen surface densities and, hence, oxide thicknesses on aluminum.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.1661009