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Evaluation of spatial and temporal resolution on in situ annealing aberration-corrected transmission electron microscopy with proportional-integral-differential controller

The in situ annealing observation in transmission electron microscope (TEM) is one of the effective methods for imaging thermally induced microstructural changes. For applying this dynamical characterization to bulk samples fabricated by ion-milling, electro-polishing or focused ion beam (FIB) mill,...

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Published in:Microscopy 2019-06, Vol.68 (3), p.271-278
Main Authors: Shimada, Yusuke, Yoshida, Kenta, Inoue, Koji, Shiraishi, Takahisa, Kiguchi, Takanori, Nagai, Yasuyoshi, Konno, Toyohiko J
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cited_by cdi_FETCH-LOGICAL-c293t-47acbb0a3925139687972d25e3450c0155cfebd22aa59679d504a5719bb424cc3
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container_end_page 278
container_issue 3
container_start_page 271
container_title Microscopy
container_volume 68
creator Shimada, Yusuke
Yoshida, Kenta
Inoue, Koji
Shiraishi, Takahisa
Kiguchi, Takanori
Nagai, Yasuyoshi
Konno, Toyohiko J
description The in situ annealing observation in transmission electron microscope (TEM) is one of the effective methods for imaging thermally induced microstructural changes. For applying this dynamical characterization to bulk samples fabricated by ion-milling, electro-polishing or focused ion beam (FIB) mill, it is generally needed to use a heating-pot type system. We here report an initial trial to improve the spatial and temporal resolution during the in-situ annealing observation of bulk samples using a spherical aberration corrected (AC) TEM with a new thermal control unit. The information limit of 1.5 Å and the point resolution of 2.0 Å are achieved under isothermal annealing at 350°C, which is the same resolution at room temperature, and it is affected strongly of sample drift by the temperature variation. The sample is heated at a heating rate of +1.0°C/s, the drift distance observed by a TV readout speed CCD camera is less than 2.0 Å/s.
doi_str_mv 10.1093/jmicro/dfz010
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title Evaluation of spatial and temporal resolution on in situ annealing aberration-corrected transmission electron microscopy with proportional-integral-differential controller
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