Metrological sensitivity improvement of through-focus scanning optical microscopy by controlling illumination coherence

We investigate the influence of the degree of illumination coherence on through-focus scanning optical microscopy (TSOM) in terms of metrological sensitivity. The investigation reveals that the local periodicity of the target object is a key structural parameter to consider when determining the opti...

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Bibliographic Details
Published in:Optics express 2019-02, Vol.27 (3), p.1981-1990
Main Authors: Park, Shin-Woong, You, Byeong Geon, Park, Gyunam, Kim, Youngbaek, Lee, Junho, Cho, Joong Hwee, Yi, Yun, Kim, Hwi
Format: Article
Language:English
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Summary:We investigate the influence of the degree of illumination coherence on through-focus scanning optical microscopy (TSOM) in terms of metrological sensitivity. The investigation reveals that the local periodicity of the target object is a key structural parameter to consider when determining the optimal degree of illumination coherence for improved metrological sensitivity. The optimal coherence conditions for the TSOM inspection of several target objects are analyzed through numerical simulation.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.27.001981