Four-Dimensional Scanning Transmission Electron Microscopy (4D-STEM): From Scanning Nanodiffraction to Ptychography and Beyond

Scanning transmission electron microscopy (STEM) is widely used for imaging, diffraction, and spectroscopy of materials down to atomic resolution. Recent advances in detector technology and computational methods have enabled many experiments that record a full image of the STEM probe for many probe...

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Bibliographic Details
Published in:Microscopy and microanalysis 2019-06, Vol.25 (3), p.563-582
Main Author: Ophus, Colin
Format: Article
Language:English
Subjects:
Computer applications
Datasets
Diffraction
Experiments
Imaging
Mapping
Materials Applications
Names
Nanodiffraction
Phase contrast
Scanning electron microscopy
Scanning transmission electron microscopy
Sensors
Spectroscopy
Transmission electron microscopy
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Summary:Scanning transmission electron microscopy (STEM) is widely used for imaging, diffraction, and spectroscopy of materials down to atomic resolution. Recent advances in detector technology and computational methods have enabled many experiments that record a full image of the STEM probe for many probe positions, either in diffraction space or real space. In this paper, we review the use of these four-dimensional STEM experiments for virtual diffraction imaging, phase, orientation and strain mapping, measurements of medium-range order, thickness and tilt of samples, and phase contrast imaging methods, including differential phase contrast, ptychography, and others.
ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927619000497