Particle Tracking of Microelectromechanical System Performance and Reliability

Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2018-12, Vol.27 (6), p.948-950
Main Authors: Copeland, Craig R., McGray, Craig D., Geist, Jon, Stavis, Samuel M.
Format: Article
Language:English
Subjects:
Component reliability
Fluorescence
Friction
Microelectromechanical systems
Micromechanical devices
motion
Motion measurement
particle
Particle tracking
Ratcheting
Reliability
Serrated yielding
Stiction
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Summary:Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a torsional ratcheting actuator and observe dynamic behavior ranging from nearly perfect repeatability, to transient feedback and stiction, to terminal failure. This new measurement capability will help to understand and improve MEMS motion. [2018-0118]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2018.2874771