Advances in superconducting quantum electronic microcircuit fabrication

Standard microelectronic fabrication techniques have been utilized to produce batch quantities of superconducting quantum electronic devices and circuits. The overall goal is a fabrication technology yielding circuits that are rugged and stable and capable of being fabricated controllably and reprod...

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Bibliographic Details
Published in:IEEE transactions on magnetics 1975-03, Vol.11 (2), p.778-781
Main Authors: Kirschman, R., Notarys, H., Mercereau, J.
Format: Article
Language:English
Subjects:
Fabrication
Inorganic materials
Lithography
Microelectronics
Prototypes
Size control
Superconducting devices
Superconducting materials
Superconducting thin films
Thin film circuits
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Summary:Standard microelectronic fabrication techniques have been utilized to produce batch quantities of superconducting quantum electronic devices and circuits. The overall goal is a fabrication technology yielding circuits that are rugged and stable and capable of being fabricated controllably and reproducibly in sizeable quantities. Our progress toward this goal is presented, with primary emphasis on the most recent work, which includes the use of electron-beam lithography and techniques of hybrid microelectronics. Several prototype microcircuits have been successfully fabricated. These microcircuits are formed in a thin-film parent material consisting of layers of superconducting and normal metals, and use proximity-effect structures as the active circuit elements.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.1975.1058675