Behavior of Impurities during Chemical Vapor Deposition of GaAs

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1976-01, Vol.123 (5), p.698-702
Main Authors: Sidorov, Yu. G., Vasil'eva, L. F., Sabinina, I. V., Dvoretsky, S. A., Sidorova, A. V.
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2132912