3D surface topography imaging in SEM with improved backscattered electron detector: Arrangement and reconstruction algorithm

•New detectors arrangement decreases electron probe initial energy.•New technique for 3D surface reconstruction is proposed.•Improved detector configuration increases sensitivity to surface gradient. We propose a new SFS (shape from shading) technique for improved 3D surface reconstruction and imagi...

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Bibliographic Details
Published in:Ultramicroscopy 2019-12, Vol.207, p.112830-112830, Article 112830
Main Authors: Borzunov, A.A., Karaulov, V.Y., Koshev, N.A., Lukyanenko, D.V., Rau, E.I., Yagola, A.G., Zaitsev, S.V.
Format: Article
Language:English
Subjects:
3D topography
Backscattered electrons detector
Reconstruction algorithm
Scanning electron microscopy
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Summary:•New detectors arrangement decreases electron probe initial energy.•New technique for 3D surface reconstruction is proposed.•Improved detector configuration increases sensitivity to surface gradient. We propose a new SFS (shape from shading) technique for improved 3D surface reconstruction and imaging of relatively smooth surface topography using the scanning electron microscope (SEM). The new arrangement of backscattered electrons detector plates allows decreasing the initial energy of the electron probe, which makes this SEM technique to be suitable for usage on radiation-sensitive samples like biological tissues. Experiments show high effectiveness of the method, which improves both the gradient sensitivity of the signal and the signal to noise ratio.
ISSN:0304-3991
1879-2723
DOI:10.1016/j.ultramic.2019.112830