Single-channel method for measuring the reflectance spectra of grazing incidence mirrors in the extreme ultraviolet range

This Letter presents a one-channel method of measurements of a grazing incidence reflection coefficient. The idea is to use the quasi-flat field extreme ultraviolet spectrometer to produce direct and reflected from the sample images of the spectral lines simultaneously at the same detector matrix. T...

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Bibliographic Details
Published in:Optics letters 2019-10, Vol.44 (20), p.4949-4952
Main Authors: Abramenko, D. B., Antsiferov, P. S., Dorokhin, L. A., Medvedev, V. V., Sidelnikov, Yu. V., Chkhalo, N. I., Polkovnikov, V. N.
Format: Article
Language:English
Subjects:
Dependence
Grazing incidence
Line spectra
Reflectance
Reflection
Ruthenium
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Summary:This Letter presents a one-channel method of measurements of a grazing incidence reflection coefficient. The idea is to use the quasi-flat field extreme ultraviolet spectrometer to produce direct and reflected from the sample images of the spectral lines simultaneously at the same detector matrix. The analysis of a set of spectral lines in the working spectral range of the spectrometer gives the spectral dependence of the reflection coefficient. The results of the refection coefficient measurements for a plane ruthenium mirror for grazing angles of 6° and 10° in the spectral range 15–40 nm are presented.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.44.004949