Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection

We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary me...

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Bibliographic Details
Published in:ACS applied materials & interfaces 2019-11, Vol.11 (45), p.42349-42357
Main Authors: Yun, Jeonghoon, Ahn, Jae-Hyuk, Moon, Dong-Il, Choi, Yang-Kyu, Park, Inkyu
Format: Article
Language:English
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Summary:We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary metal–oxide–semiconductor (CMOS) processes, and Pd nanoparticles were coated on the SiNWs by a physical vapor deposition method. Suspended Pd-SiNWs were simply obtained by etching buried oxide layer and Pd deposition. Joule heating of Pd-SiNW (
ISSN:1944-8244
1944-8252
DOI:10.1021/acsami.9b15111