Mechanism and morphology control of underwater femtosecond laser microgrooving of silicon carbide ceramics

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Bibliographic Details
Published in:Optics express 2019-09, Vol.27 (19), p.26264-26280
Main Authors: Zheng, Qingzhen, Fan, Zhengjie, Jiang, Gedong, Pan, Aifei, Yan, Zhaoxuan, Lin, Qingyan, Cui, Jianlei, Wang, Wenjun, Mei, Xuesong
Format: Article
Language:English
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.27.026264