Highly conductive and transparent amorphous tin oxide

The physical properties of chemically sprayed tin oxide films have been investigated. The optical and transport behavior of both amorphous and polycrystalline material depends on the reaction temperature. Amorphous films deposited at very low temperatures (Ts=220 °C) possess a conductivity as high a...

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Bibliographic Details
Published in:Journal of applied physics 1983, Vol.54 (1), p.431-434
Main Authors: JOUSSE, D, CONSTANTINO, C, CHAMBOULEYRON, I
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
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Summary:The physical properties of chemically sprayed tin oxide films have been investigated. The optical and transport behavior of both amorphous and polycrystalline material depends on the reaction temperature. Amorphous films deposited at very low temperatures (Ts=220 °C) possess a conductivity as high as that of the polycrystalline layers. Hall effect measurements and compositional analyses of those amorphous films show that nonintentional chlorine doping is responsible for the increased conductivity. Optical transmission in the visible region of the spectrum is almost as good in amorphous as in polycrystalline material. An antireflecting coating of amorphous tin oxide with an optical gain of 40% has been achieved on silicon wafers. Furthermore, film thickness homogeneity broadens the field of application to various optoelectronic devices.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.331675